Carbon nanostructures synthesis in microwave plasma torch at atmospheric pressure

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Authors

JAŠEK Ondřej ELIÁŠ Marek ZAJÍČKOVÁ Lenka KUČEROVÁ Zuzana MATĚJKOVÁ Jiřina REK Antonín BURŠÍK Jiří

Year of publication 2006
Type Article in Proceedings
Conference Book of Abstracts 3rd International conference on microwave chemistry
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords carbon nanostructures; atmospheric pressure; microwave discharge; electron microscopy
Description We have successfully synthesized CNTs in microwave plasma torch at atmospheric pressure from the mixture of methane, hydrogen and argon. The plasma torch was generated at the frequency of 2.45 GHz using an iron hollow electrode. Argon (1000 sccm) was flowing through the electrode whereas methane (10-40 sccm) and hydrogen (100-400 sccm) were added to the expanding torch from outside. The CNTs were grown on substrates placed at various distances from the torch electrode. The substrates were silicon wafers(10x15 mm) with deposited 200 nm thick silicon oxide layer and thin layer (5-20 nm) of iron catalyst on the top. The samples were imaged by scanning electron microscopy(SEM) and transmission electron microscopy(TEM). The processes in the discharge were monitored by optical emission spectroscopy(OES). The SEM analysis showed presence of well aligned 50 micrometer long multi-wall CNTs with narrow diameter distribution centered around 20 nm. Except the carbon nanotubes the layers often contained various carbon and carbon/iron structures.
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