Deposition of protective couatings in RF organosilicon discharges

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Authors

ZAJÍČKOVÁ Lenka BURŠÍKOVÁ Vilma FRANTA Daniel KUČEROVÁ Zuzana BOUSQUET Angelique GOULLET Antoine GRANIER Agnes

Year of publication 2006
Type Article in Proceedings
Conference In Abstracts of Invited Lectures and Contributed Papers, 18th Europhysics Conference on Atomic and Molecular Physics of Ionized Gases
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords deposition-organosilicon-discharge
Description The aim of the present paer was to study the deposition of protective coatings in RF organosilicon discharges.
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