Optical emission spectroscopy of microwave plasma torch during deposition of carbon nanotubes
Authors | |
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Year of publication | 2006 |
Type | Article in Proceedings |
Conference | In Abstracts of Invited Lectures and Contributed Papers, XVth Europhysics Conference on Atomic and Molecular Physics of Ionized Gases |
MU Faculty or unit | |
Citation | |
Field | Plasma physics |
Keywords | carbon-nanotubes-deposition-optical-emission-spectroscopy |
Description | We perfomed the ptical emission spectroscopy of microwave plasma torch during the process of plasmachemical deposition of carbon nanotubes. |
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