Fast hydrogen ions in capacitively coupled discharge

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Authors

DVOŘÁK Pavel JANČA Jan

Year of publication 2006
Type Article in Proceedings
Conference Abstracts of Invited Lectures and Contributed Papers of 18th Europhysics Conference on the Atomic and Molecular Physics of Ionised Gases
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords IED hydrogen plasma ions
Description Fast hydrogen ions H+ were detected in a hydrogen capacitively coupled discharge. Their creation was explained by a dissociative ionization of the H2 molecules by electron impact via the repulsive 2Sigma u+ state of the H2+. This process requires high-energy electrons. By means of Langmuir probe measurements it was shown, that the high-energy electrons are present at low pressure in the discharge.
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