Sheath resistance in RF discharges
| Authors | |
|---|---|
| Year of publication | 2006 |
| Type | Article in Proceedings |
| Conference | Abstracts of Invited Lectures and Contributed Papers of 18th Europhysics Conference on the Atomic and Molecular Physics of Ionised Gases |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | sheath resistance discharge probe |
| Description | The sheath resistance in capacitively coupled discharge was studied. The nonlinearity of the sheath for dc current was proved, i.e. the sheath resistance depended on the dc current flowing through the sheath. It was shown, that the nonlinear behaviour can be used in some cases for the approximate evaluation of the plasma parameters, especially in the sheaths, where the interpretation of the Langmuir probe measurements is not reliable. |
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