Study of Mechanical Properties of NCD Coatings
| Authors | |
|---|---|
| Year of publication | 2007 |
| Type | Article in Proceedings |
| Conference | VI. ročník konferencie Vrstvy a povlaky 2007 |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | Mechanical Properties; NCD Coatings; |
| Description | The aim of the present paper was to deposit nanocrystalline diamond (NCD) films with low surface roughness, high hardness and fracture toughness by microwave PECVD in the ASTEX type reactor from mixture of methane and hydrogen. The diamond nucleation process was enhanced by RF induced dc self bias of minus 125 V. The interfacial fracture toughness substantially depended on the process of RF induced dc self-bias application. In case of samples when the RF induced dc self-bias was applied after the introduction of methane into the deposition mixture the interfacial fracture toughness was substantially higher becauseof creation of amorphous carbon intermediate layer between the silicon substrate and the nanocrystalline film. |
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