Studying an influence of a nucleation phase on nanocrystalline diamond film properties

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Authors

KARÁSKOVÁ Monika ZAJÍČKOVÁ Lenka JAŠEK Ondřej BURŠÍKOVÁ Vilma FRANTA Daniel MATĚJKOVÁ Jiřina KLAPETEK Petr

Year of publication 2007
Type Article in Periodical
Magazine / Source Acta Metallurgica Slovaca
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords nanokrystalline diamond; plasma enhanced CVD; bias enhanced nucleation; hardness
Description In the present paper we studied influence of a nucleation phase on nanocrystalline diamond film properties. We determined the mechanical and optical properties of the prepared samples. The surface was studied using AFM and HRSEM techniques.
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