Radial Structure of RF Discharge in Neon

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Authors

NAVRÁTIL Zdeněk TRUNEC David DVOŘÁK Pavel

Year of publication 2008
Type Article in Proceedings
Conference 2nd Central European Symposium on Plasma Chemistry - Book of Extended Abstracts
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords plasma; capacitive; neone; discharge; optical emmision spectroscopy
Description Radial structure of low-pressure capacitive RF (13.56 MHz) discharge ignited in neon was studied by means of optical emmision spectroscopy.
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