Study of the Mechanical Properties of Diamond-like Carbon Coatings on Polymer Substrates

Warning

This publication doesn't include Faculty of Arts. It includes Faculty of Science. Official publication website can be found on muni.cz.

Authors	STOICA Adrian BURŠÍKOVÁ Vilma KELAR Lukáš NOVOTNÝ Tomáš
Year of publication	2009
Type	Article in Proceedings
Conference	Frontiers in Low Temperature Plasma Diagnostic 8
MU Faculty or unit	Faculty of Science
Citation
Field	Solid matter physics and magnetism
Keywords	Mechanical Properties; Diamond-like Carbon; Coatings; Polymer Substrates
Description	We focused our work on optimizing the deposition parametres to improve the coatings adhesion to the polymer surface. Hzdrogenate amorphous carbon (a-C:H) and nitrogen incorporated hzdrogenated amorphous carbon (a-C:H:N) films were deposited on polycarbonate, glass reinforced PPS, and BMC substrates by r.f. plasma enhanced chemical vapor deposition (PECVD) A mixture of hexamethyldisiloxane (HMDSO) and CH4/N2/H2 gases was utilized to reduce the internal compressive stress of the deposited films.
Related projects:	Deposition of thermomehanically stable nanostructured diamond-like thin films in dual frequency capacitive discharges Nanometrologie využívající metod rastrovací sondové mikroskopie