Study of the Mechanical Properties of Diamond-like Carbon Coatings on Polymer Substrates

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Authors

STOICA Adrian BURŠÍKOVÁ Vilma KELAR Lukáš NOVOTNÝ Tomáš

Year of publication 2009
Type Article in Proceedings
Conference Frontiers in Low Temperature Plasma Diagnostic 8
MU Faculty or unit

Faculty of Science

Citation
Field Solid matter physics and magnetism
Keywords Mechanical Properties; Diamond-like Carbon; Coatings; Polymer Substrates
Description We focused our work on optimizing the deposition parametres to improve the coatings adhesion to the polymer surface. Hzdrogenate amorphous carbon (a-C:H) and nitrogen incorporated hzdrogenated amorphous carbon (a-C:H:N) films were deposited on polycarbonate, glass reinforced PPS, and BMC substrates by r.f. plasma enhanced chemical vapor deposition (PECVD) A mixture of hexamethyldisiloxane (HMDSO) and CH4/N2/H2 gases was utilized to reduce the internal compressive stress of the deposited films.
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