Homogenization of CZ Si wafers by Tabula Rasa annealing

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Authors	MEDUŇA Mojmír CAHA Ondřej KUBĚNA Josef KUBĚNA Alan BURŠÍK Jiří
Year of publication	2009
Type	Conference abstract
MU Faculty or unit	Faculty of Science
Citation
Description	The differences in oxygen precipitation, precipitate morphology and evolution of point defects in samples with and without Tabula Rasa applied were studied by experimental techniques such us infrared absorption spectroscopy, transmission electron microscopy, etching techniques and x-ray diffraction.
Related projects:	Physical and chemical properties of advanced materials and structures Nucleation and growth of oxygen precipitates in silicon