Suppressed hysteresis behaviour of Ti sputtering in acetylene gas

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Authors

SCHMIDTOVÁ Tereza VAŠINA Petr ELIÁŠ Marek

Year of publication 2010
Type Conference abstract
MU Faculty or unit

Faculty of Science

Citation
Description Suppressed hysteresis behaviour of Ti sputtering in acetylene gas. Modelling of hybrid PVD-PECVD process.
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