Role vodíku na strukturální změny SiGe:H vrstev

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Title in English	Role of hydrogen on structural changes in SiGe:H films
Authors	SLÁDEK Petr BURŠÍKOVÁ Vilma SŤAHEL Pavel
Year of publication	2011
Type	Article in Proceedings
Conference	Sborník příspěvků 5. České fotovoltaické konference
MU Faculty or unit	Faculty of Education
Citation
Field	Plasma physics
Keywords	hydrogen; thin films; SiGe
Description	The paper focuses on studying the impact of the role of hydrogen on the properties of thin layers of SiGe: H. To determine the optoelectronic properties of films we used IR, PDS, CPM and intendation dynamic method for determining the mechanical properties. In addition, samples were subjected to measurements of the thermal desorption of hydrogen. The results indicate a different incorporation of hydrogen in films with variation of the deposition conditions.
Related projects:	Nanometrologie využívající metod rastrovací sondové mikroskopie