Role vodíku na strukturální změny SiGe:H vrstev

Warning

This publication doesn't include Faculty of Arts. It includes Faculty of Education. Official publication website can be found on muni.cz.
Title in English Role of hydrogen on structural changes in SiGe:H films
Authors

SLÁDEK Petr BURŠÍKOVÁ Vilma SŤAHEL Pavel

Year of publication 2011
Type Article in Proceedings
Conference Sborník příspěvků 5. České fotovoltaické konference
MU Faculty or unit

Faculty of Education

Citation
Field Plasma physics
Keywords hydrogen; thin films; SiGe
Description The paper focuses on studying the impact of the role of hydrogen on the properties of thin layers of SiGe: H. To determine the optoelectronic properties of films we used IR, PDS, CPM and intendation dynamic method for determining the mechanical properties. In addition, samples were subjected to measurements of the thermal desorption of hydrogen. The results indicate a different incorporation of hydrogen in films with variation of the deposition conditions.
Related projects:

You are running an old browser version. We recommend updating your browser to its latest version.