Higher harmonic frequencies in capacitive discharges and their using for monitoring of plasma processing

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Authors	DVOŘÁK Pavel BURŠÍKOVÁ Vilma ŽEMLIČKA Radek
Year of publication	2011
Type	Conference abstract
MU Faculty or unit	Faculty of Science
Citation
Description	Waveforms of discharge voltage and current and their changes induced by changes of plasma parameters (namely during deposition processes) were studied.
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