The aim of the project is to investigate the mechanism of growth of hard and superhard coatings, such as nitrides of transition metals, 'hard amorphous Si0xNy , Si0xCy , Si0xCyHz and BN coatings, diamond and carbon nitride coatings, and to develop new ge neration of hard nanocomposite coatings composed of hard nanocrystalline phase and amorphous or metallic matrix. The nanocomposite coatings with "hard' matrix will represent a new class of superhard coatings with a high Young modulus. The nanocomposite c oatings with "soft" matrix will represent a new class of hard coatings with higher toughness. To achieve this goal a systematic basic research concentrated on (i) formation of nanocrystalline and amorphous films, (ii) formation of "high temperature" stru ctures at low temperatures of about 100 °C or lower, (iii) investigation of plasmochemical reactions relevant for the forming of the mentioned advanced materials, (iv) intermixing of coating and substrate elements and on (v) adhesion of hard coatings to

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