Modelling of plasma potential waveform in capacitively coupled discharges

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Authors

DVOŘÁK Pavel ŽEMLIČKA Radek

Year of publication 2012
Type Article in Proceedings
Conference Potential and Applications of Surface Nanotreatment of Polymers and Glass - Book of Extended Abstracts
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords capacitively coupled discharges; plasma potential; higher harmonic frequencies
Description A model of nonlinear electric behaviour of low pressure capacitively coupled discharges is presented. Comparison of the model with an experiment is shown and problematics of discharge asymmetry is discussed. The model demonstrates that the assumption of sheath collapse during the RF period can not be used in accurate calculations. Eigenfrequency of plasma oscillations was studied and it was observed, that this frequency depends mainly on electron concentration and distance between electrodes, but discharge asymmetry and amplitude of discharge voltage influence the eigenfrequency as well.
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