Effects of DC bias on the PECVD deposition of thin films from octamethylcyclotetrasiloxane (OMTS) and oxygen mixtures

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Authors	ZAJÍČKOVÁ Lenka KRZYŽÁNKOVÁ Michaela JANČA Jan
Year of publication	1995
Type	Article in Proceedings
Conference	Proceedings of 17th Symposium on Plasma Physics and Technology
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Description	Effects of DC bias on the PECVD deposition of thin films from octamethylcyclotetrasiloxane (OMTS) and oxygen mixtures
Related projects:	Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates