Optical diagnostics of inductively coupled RF discharge

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Authors

ELIÁŠ Marek KUDRLE Vít BURŠÍKOVÁ Vilma JANČA Jan

Year of publication 2001
Type Article in Proceedings
Conference SAPP 13th Symposium Proceedings
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords Optical diagnostics; inductively coupled RF discharge
Description Optical diagnostics of inductively coupled RF discharge
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