Optical diagnostics of inductively coupled  RF discharge

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Authors	ELIÁŠ Marek KUDRLE Vít BURŠÍKOVÁ Vilma JANČA Jan
Year of publication	2001
Type	Article in Proceedings
Conference	SAPP 13th Symposium Proceedings
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	Optical diagnostics; inductively coupled RF discharge
Description	Optical diagnostics of inductively coupled RF discharge
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