Mode transition in r.f. capacitive discharge in hydrogen

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Authors

DVOŘÁK Pavel ZAJÍČKOVÁ Lenka JANČA Jan

Year of publication 2003
Type Article in Proceedings
Conference Proceedings of 26th ICPIG
MU Faculty or unit

Faculty of Informatics

Citation
Field Plasma physics
Keywords rf capacitive discharges; mode transition; hydrogen
Description We have studied low-pressure capacitively coupled rf discharges in hydrogen. Two different discharge modes were observed. These two modes differ significantly in the plasma potential and in the nature of sheaths. For diagnostic purposes the Plasma Process Monitor, optical emission spectroscopy and Lamgmuir probe were used.
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