Spatial Distribution of Species in an IPVD reactor

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Authors

BUBLAN Martin VAŠINA Petr DE POUCQUES Ludovic BOISSE-LAPORTE Caroline IMBERT Jean-Christophe TOUZEAU Michel

Year of publication 2003
Type Article in Proceedings
Conference WDS 03 Proceeding of Contributed Papers
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords optical emission spectroscopy; optical absorption spectroscopy; IPVD; magnetron
Description Results of emission and absorption spectroscopy carried out in the IPVD reactor, consisting of magnetron sputtering device assisted by two antennas of microwave system are presented in this study. The results of the SEM analysis of deposited films are presented too.
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