Influence of silicon, oxygen and nitrogen admixtures on the properies of plasma deposited amorphous diamond-like carbon coating

Warning

This publication doesn't include Faculty of Arts. It includes Faculty of Science. Official publication website can be found on muni.cz.

Authors	BURŠÍKOVÁ Vilma ZAJÍČKOVÁ Lenka DVOŘÁK Pavel FRANTA Daniel PEŘINA Vratislav JANČA Jan
Year of publication	2005
Type	Article in Proceedings
Conference	International Conference ELMECO-5, Book of Abstracts
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	DLC; protective coatings; PECVD
Description	Modification of DLC coatings with silicon, oxygen and nitrogen admixtures, enhancement of mechanical properties,
Related projects:	Multiscale approach to relationships between mechanical and microstructural characteristics of materials Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates