Ionized physical vapor deposition by high power fast pulsed magnetron discharge

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Authors

GANCIU Mihai VAŠINA Petr MEŠKO Marcel IMBERT Jean-Christophe DE POUCQUES Ludovic BOISSE-LAPORTE Caroline BRETAGNE Jean TOUZEAU Michel VOLDOIRE Olivier HUGON Marie-Christine AGIUS Bernard

Year of publication 2005
Type Article in Proceedings
Conference Actes du workshop Nouveaux oxydes a forte permittivite dans l integration des semi-conducteurs
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords pulsed magnetron discharge; IPVD
Description Study of newly developed preionized (by low DC current) high power pulsed magnetron discharge.
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