Ionized physical vapor deposition by high power fast pulsed magnetron discharge

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Authors	GANCIU Mihai VAŠINA Petr MEŠKO Marcel IMBERT Jean-Christophe DE POUCQUES Ludovic BOISSE-LAPORTE Caroline BRETAGNE Jean TOUZEAU Michel VOLDOIRE Olivier HUGON Marie-Christine AGIUS Bernard
Year of publication	2005
Type	Article in Proceedings
Conference	Actes du workshop Nouveaux oxydes a forte permittivite dans l integration des semi-conducteurs
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	pulsed magnetron discharge; IPVD
Description	Study of newly developed preionized (by low DC current) high power pulsed magnetron discharge.
Related projects:	Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface Pokročilé směry ve fyzice a chemii plazmatu