Mechanical properties of amorphous and nanocrystalline silicon thin films on flexible substrates

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Authors	BURŠÍKOVÁ Vilma SLÁDEK Petr SŤAHEL Pavel
Year of publication	2005
Type	Article in Proceedings
Conference	NENAMAT International Conference Proceedings NANO05
MU Faculty or unit	Faculty of Education
Citation
Field	Solid matter physics and magnetism
Keywords	Mechanical properties; Amorphous silicon; Nanocrystalline Silicon
Description	The objective of our study was to investigate the mechanical properties of amorphous and nanocrystalline silicon thin layer deposited on flexible sustrates by means of depth sensing intendation method.
Related projects:	Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface