Spatially resolved optical diagnostics of neon RF discharge

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Authors

NAVRÁTIL Zdeněk MATÚŠKA Ján TRUNEC David MATEJČÍK Štefan ŠMÍD Radek LAZAR Lukáš

Year of publication 2007
Type Article in Proceedings
Conference Book of Abstracts of 16th Symposium on Application of Plasma Processes
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords neon RF discharge; optical emission spectroscopy; collisional-radiative model
Description Capacitively coupled RF discharge in neon (13.56 MHz) was studied by spatially resolved optical emission spectroscopy and collisional-radiative model. Two discharge regimes at different pressures (10 and 80 Pa) were investigated. The measured intensities of prominent neon spectral lines in conjunction with the model were used to determine the electron temperature.
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