Spatially resolved optical diagnostics of neon RF discharge
| Authors | |
|---|---|
| Year of publication | 2007 |
| Type | Article in Proceedings |
| Conference | Book of Abstracts of 16th Symposium on Application of Plasma Processes |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | neon RF discharge; optical emission spectroscopy; collisional-radiative model |
| Description | Capacitively coupled RF discharge in neon (13.56 MHz) was studied by spatially resolved optical emission spectroscopy and collisional-radiative model. Two discharge regimes at different pressures (10 and 80 Pa) were investigated. The measured intensities of prominent neon spectral lines in conjunction with the model were used to determine the electron temperature. |
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