Investigation of the mechanical properties of the thin tungsten films deposited by Thermionic Vacuum Arc (TVA) methode

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Authors

VLADOIU R. MUSA G. CIUPINA V. BURŠÍKOVÁ Vilma BLÁHOVÁ Olga

Year of publication 2007
Type Article in Proceedings
Conference 18th International Symposium on Plasma Chemistry, Abstracts and Full-Papers CD
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords TVA;tungsten;mechanical properties
Description Investigation of the mechanical properties of the thin tungsten films deposited by Thermionic Vacuum Arc (TVA) methode
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