Plasma treatment of silicon surface

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Authors

SKÁCELOVÁ Dana HANIČINEC Martin SŤAHEL Pavel ČERNÁK Mirko

Year of publication 2010
Type Article in Proceedings
Conference Potential and Applications of Thin Ceramic and Metal Coatings
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords silicon surface - dielectric barrier discharge - plasma treatment
Description The contribution focuses on the plasma treatment of crystalline silicon surface. The plasma was generated by Diffuse Coplanar Surface Barrier Discharge (DCSBD) at atmospheric pressure in an ambient air. By means of the contact angle measurements surface free energy was studied an by atomic force microscope (AFM) the surface roughness of silicon before and after plasma treatment was investigated.
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