Investigation of silicon surface wettability after plasma treatment

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Authors

SKÁCELOVÁ Dana SŤAHEL Pavel HANIČINEC Martin ČERNÁK Mirko

Year of publication 2010
Type Article in Proceedings
Conference HAKONE XII Contributed paper
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords Diffuse coplanar DBD, silicon, plasma treatment
Description In this contribution the influence of the plasma on crystalline Si (100) surface was studied. Dielectric barrier discharge the so called Diffuse Coplanar Surface Barrier Discharge (DCSBD) to plasma modification was used. The silicon surface modification after plasma treatment was investigated by AFM and contact angle measurement. Different way to clean the surface is reflected on the surface wettability after plasma treatment and the ageing effect of treated surface was studied too.
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