Project information
Synthesis of carbon micro- and nanostructures by plasma technologies
- Project Identification
- GA202/05/0607
- Project Period
- 1/2005 - 12/2007
- Investor / Pogramme / Project type
-
Czech Science Foundation
- Standard Projects
- MU Faculty or unit
- Faculty of Science
- Keywords
- nanostructures, carbon nanotubes, plasma enhanced chemical vapor deposition, PECVD
The project will study the growth of carbon nanotubes (CNTs) and nanofibers (CNFs) by plasma enhanced CVD and compare different discharges (microwave, r.f. CCP and ICP, modified magnetron sputtering system). The aim is also to produce CNTs at low temperatures, in atmospheric pressure discharges and to growth single-walled nanotubes. Moreover, the synthesis of carbon nanostructures, e.g. structured polymers, CNTs and fullerenes, in pulsed radio frequency glow discharges will be carried out. The influence of the pulse duration on the deposition will be investigated. The micro- and nanocrystalline diamond will be deposited by PECVD and its properties will be controlled by changing the crystallite size and dopping by other elements, e.g. boron. The nanocomposite films containing CNTs and CNFs will be prepared by PECVD. The films will be studied as concern their mechanical, optical and electrical properties. The carbon nanostructures will be prepared for functional nanoscale devices (e.g. field emmitors, blind tip estimation standards for AFM) and for modification of material surface properties (optical, mechanical and electromagnetic). The discharges used for the processes will be investigated by optical emission spectroscopy, mass spectrometry and Langmuir probe. The deposits will be characterized by TEM and SEM, AFM, FTIR and Raman spectroscopy, RBS and ERDA, XPS, XRD. The networking of the Czech labs for advanced material characterization will be established.
Publications
Total number of publications: 38
2006
-
Carbon nanotubes synthesized by plasma enhanced CVD: Preparation of measurement of their electrical properties
Czechoslovak Journal of Physics, year: 2006, volume: 56, edition: Suppl 2
-
Deposition and Characterisation of Nanostructured silicon-oxide Containing Diamond-like Carbon Coatings
7th International Balkan Workshop on Applied Physics - Abstracts, year: 2006
-
Depozice nanokrystalických diamantových vrstev metodou PECVD v mikrovlnném reaktoru typu ASTEX
Moderní trendy ve fyzice plazmatu a pevných látek II, year: 2006
-
Depozice uhlíkových nanotrubek metodami PECVD
Zpravodaj české vakuové společnosti, year: 2006, volume: 16, edition: 1-2
-
Depth sensing indentation at nano- and microscale
2. Slovensko - Český seminár "Lokálne mechanické vlastnosti, year: 2006
-
Mechanical properties of nanostructured composite diamond films prepared by PECVD enhanced by RF induced DC self bias
E-MRS 2006 Fall meeting, year: 2006
-
Mechanické vlastnosti nanokrystalických diamantových vrstev
Vrstvy a povlaky 2006, year: 2006
-
Microwave PECVD of nanocrystalline diamond with rf induced bias nucleation
Czechoslovak Journal of Physics B, year: 2006, volume: 56, edition: 1
-
Nanocomposite Diamond-Like Carbon Coatings Studied by AEM and Depth Sensing Indentation Test
EMAS 2006, year: 2006
-
Optical emission spectroscopy of microwave plasma torch during deposition of carbon nanotubes
In Abstracts of Invited Lectures and Contributed Papers, XVth Europhysics Conference on Atomic and Molecular Physics of Ionized Gases, year: 2006