Project information
Plasma deposition of protective coatings: characterisation of prepared films and diagnostics of reactive plasmas used
- Project Identification
- GA202/00/P037
- Project Period
- 1/2000 - 1/2002
- Investor / Pogramme / Project type
-
Czech Science Foundation
- Standard Projects
- MU Faculty or unit
- Faculty of Science
The plasmachemical deposition of protective coatings in different types of discharges (radiofrequency capacitively or inductively coupled glow discharges at decreased pressure, microwave and barrier discharges, atmospheric pressure glow discharge APG, p lasma pencil) will be studied. The first main part of the project is the preparation of a multilayer system protecting polycarbonate against mechanical damages and degradation by UV radiation. Some organosilicon compounds, e.g. hexamethyldisiloxane will be used as monomer. The result should be a graduated layer transparent in the visible, well adherent to polycarbonate and with the hardness comparable to glass. The second main part of the research is the deposition of superhard films such as amorphous d iamond like carbon (DLC) films, DLC with addition of silicon, nanocomposite films based on CNx and microcrystalline diamond films. The study of optical and mechanical film properties as well as their composition and structure will be supplemented by plas
Publications
Total number of publications: 21
2001
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Optical Characterization of Diamond-like Carbon Films
Vacuum, year: 2001, volume: 61, edition: 2-4
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Optical characterization of DLC:Si films prepared by PECVD
Proceedings of 13th Symposium on Application of Plasma Processes, year: 2001
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Optical Properties of Si Incorporated Diamond-like Carbon Films Deposited by RF PECVD
JUNIORMAT 01, year: 2001
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Plasma Enhanced CVD of DLC:Si(O) Films from Methane/Hexamethyldisiloxane Feeds
Proceedings of 15th International Symposium on Plasma Chemistry, year: 2001
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Plasma modification of polycarbonates
Surface & coatings technology, year: 2001, volume: 2001, edition: 142-144
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Stanovení povrchové energie diamantu-podobných vrstev nanášených v plazmatu vysokofrekvenčního výboje
53, ZJAZD CHEMICKÝCH SPOLOČNOSTÍ, Zborník príspevkov, year: 2001
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Stanovení povrchové energie tenkých vrstev nanášených v plazmatu vysokofrekvenčního výboje
JUNIORMAT 01, year: 2001
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The deposition process based on silicon-organic compounds (HMDSO, TEOS) in two different types of an atmospheric barrier discharge
Proceedings of 15th International Symposium on Plasma Chemistry, year: 2001
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XPS and Ellipsometric Study of DLC/Silicon Interface
Vacuum, year: 2001, volume: 61, edition: 2-4
2000
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Deposits from Hexamethyldisiloxane in a Dielectric Barrier Discharge at Atmospheric Pressure
Proceedings of HAKONE VII, year: 2000